The methods and software are developed for molecular-dynamic simulation of the ion beam interaction with radiation-damaged solid surfaces having a developed relief of different scales. They are used to describe universally, basing on the fractal geometry approach, the following (Fig.1):
|nanoscale morphology of irradiated surface;|
|macroreliefs arising as a result of ion etching.|
Fig. 1 – Macroreliefs formed as a result of ion etching
The simulation results demonstrated that the characteristics of grazing ion reflection from the fractal surfaces obey the scaling relations that can be used to analyze the degree of surface radiation damage by the ion etching (Fig.2).
Fig.2. Simulation results